The measuring force of a micro/nano probe is an important factor affecting the probe measurement accuracy. The strength of the force largely depends on the nature of the suspension structure. How to improve the flexibility of the suspension structure is a difficult issue. To tackle the problem, this paper will put forwards an integrated suspension structure, which composed of three evenly spaced elastic hinges. Each elastic hinge has two beams, one of which is used to as the support. In measurement, the maximum displacement is occurred at the intersection of the two beams. In this paper, the flexibility of the suspension structure and probe measuring capability related to the elastic hinge's size and material are investigated based on theoretical modeling and simulation. The research result is significant to reduce the probe measuring force and improve its sensitivity.
In order to meet the needs of sintering optical fiber probe, a discharging device based on CA1524 is presented in this paper. First the direct current (DC) is converted into the high-voltage alternating current by push-pull power amplifier circuit. Then we can get more than 2000 V DC by voltage doubling and rectifying, and it is connected to the electrode rod for high-voltage discharge. LPC1768 is used to control the duty cycle of CA1524, which can regulate the discharge intensity; the discharge time is controlled by the LPC1764 and CA1524.