Dr. Zongshun Zeng
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 24 July 2018 Paper
Proceedings Volume 10827, 1082731 (2018) https://doi.org/10.1117/12.2501205
KEYWORDS: Optical lithography, Diffractive optical elements, Device simulation, Lithography, Critical dimension metrology, Optical design, Lithographic illumination, Optoelectronics, Resolution enhancement technologies, Standards development

Proceedings Article | 24 July 2018 Paper
Proceedings Volume 10827, 1082733 (2018) https://doi.org/10.1117/12.2501223
KEYWORDS: Fourier transforms, Micromirrors, Lithographic illumination, Sensors, Error analysis, Immersion lithography, Reticles, Optical lithography, Source mask optimization, Light scattering

Proceedings Article | 24 July 2018 Paper
Proceedings Volume 10827, 1082732 (2018) https://doi.org/10.1117/12.2501208
KEYWORDS: Optical lithography, Optical design, Fourier transforms, Device simulation, Resolution enhancement technologies, Micromirrors, Homogenization, Source mask optimization, Lens design, Optical simulations

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