Ms. Lingling Song Profile

Lingling Song

at Soochow Univ

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Proceedings Article | 6 November 2023 Paper

Study on the reduction of measurement uncertainty of line laser triangulation instrument based on optical method

Zhecheng Zhao, Lingling Song, Xinhua Chen

Proceedings Volume 12921, 1292144 (2023) https://doi.org/10.1117/12.2691745

KEYWORDS: Equipment, Speckle, Measurement uncertainty, Tunable lasers

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The line laser triangulation instrument is a non-contact dimensional measuring instrument based on the triangulation principle. With the advantages of small size, high accuracy, good stability and wide application scenarios, it is widely used in the industrial production of product surface profile inspection. The measurement uncertainty reflects the stability of the instrument measurement results, it is one of the important indicators of the line laser triangulation instrument, whose theoretical limit is determined by the speckle contrast during the test. By suppressing the speckle on the sample surface, the measurement uncertainty can be effectively reduced. In this paper, we introduce the suppression of scattering during the instrument measurement by temporal averaging method and wavelength diversity method. The paper firstly introduces the speckle theory and the principles of speckle suppression by temporal averaging and wavelength diversity, simulates and analyzes the number of superimposed average images and the speckle suppression effect in the temporal averaging and the power ratio between different wavelength light sources and the speckle suppression effect in the wavelength diversity, respectively. Then, the above methods and effects are experimentally verified by combining with the developed line laser triangulation instrument. Finally, the improved line laser triangulation instrument is compared with the measurement results of the original instrument to calculate the degree of reduction in the measurement uncertainty of the instrument. The experimental results show that the optical method can effectively suppress the sample surface speckle, reduce the measurement uncertainty of the instrument, and lay the technical foundation for the development of a higher precision laser triangulation instrument. It has important application value.

Proceedings Article | 6 November 2023 Paper

Optical element surface measurement technology based on optical coherence tomography

Anxin Wang, Linling Song, Xinhua Chen

Proceedings Volume 12921, 129213H (2023) https://doi.org/10.1117/12.2691572

KEYWORDS: Optical components, Inspection, Optical surfaces, Optical coherence tomography

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The quality of the optical element surface directly affects the performance of the element, and the inspection and evaluation of the optical element surface is necessary for the manufacturing and processing of optical elements. Optical Coherence Tomography (OCT) is a new type of optical inspection technology, which uses the low coherence characteristics of broadband light sources to obtain the position information in the depth direction of the sample, and has the advantages of non-contact, non-damaging and high resolution. In this paper, a convex lens with a diameter of 25.4 mm was inspected using an 850 nm band fiber optic type spectral domain OCT inspection system. The inspection system mainly consists of a spectral domain OCT inspection system and a scanning device. The inspection data were then fitted to the surface using the least squares method. The PV is 0.97 μm and the root mean square residual is 0.14 μm. This experiment verifies the feasibility of OCT in the field of optical element surface inspection and provides a technical accumulation for the further development of high precision inspection of optical element surface using OCT.

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