Mr. Hiroyuki Wada Profile

Hiroyuki Wada

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 22 February 2021 Presentation + Paper

High-resolution patterning for panel level packaging

Ken-Ichiro Mori, Douglas Shelton, Yoshio Goto, Hiromi Suda, Hiroyuki Wada, Hideo Tanaka, Seiya Miura

Proceedings Volume 11613, 116130C (2021) https://doi.org/10.1117/12.2583689

KEYWORDS: Packaging, Optical lithography, Computing systems, Artificial intelligence, Semiconducting wafers, Projection systems, Photoresist materials, Manufacturing equipment, Manufacturing, Image resolution

Read Abstract +

More-than-Moore approaches to improve system performance have been a hot topic for a more than a decade as a way to maximize the efficiency and increase the bandwidth of high performance computing systems. Fan-Out packaging that realizes submicron Redistribution Lines (RDL) and large die sizes is one technology that can help enable complex heterogeneous integration for applications including Artificial Intelligence (AI) and autonomous driving. For systems requiring large package sizes, Panel Level Packaging (PLP) can offer efficiency and cost advantages over Wafer Level Packaging (WLP). PLP however poses unique technical challenges including the requirement to realize uniform submicron patterning across the entire rectangular panel. To meet this challenge, Canon developed the first patterning exposure tool (stepper) capable of submicron resolution on 500 mm panels. The panel exposure tool is equipped with wide-field projection optics that offer a large 52 mm × 68 mm image field and a 0.24 NA that is optimum for submicron resolution. The stepper also features an updated panel handling system for processing up to 515 × 515 mm panels. In this paper, we will report on our study of fine patterning on rectangular panels using the submicron resolution panel stepper and will introduce technology innovations supporting advanced heterogeneous integration. Our study researched photoresist material performance and slit-coating uniformity challenges we identified through collaboration with resist vendors and slit-coating equipment manufacturers. We will report on the results of our collaborative study and will discuss current and future PLP advantages, challenges and solutions.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years