Automatic Width And Overlay Measurement

A. L. Flamholz; R. S. Charsky

doi:10.1117/12.956122

6 September 1978 Automatic Width And Overlay Measurement

A. L. Flamholz, R. S. Charsky

Proceedings Volume 0135, Developments in Semiconductor Microlithography III; (1978) https://doi.org/10.1117/12.956122
Event: Developments in Semiconductor Microlithography III, 1978, San Jose, United States

Abstract

Integrated circuit processes for producing horizontal geometries can be effectively monitored by precise linewidth measurements in both x and y directions. This paper describes a noncontact dimensional measurement system that is fully automatic and has a precision of ±0.025 µm for symmetric lines from 1 to 3 µm wide--e.g., 5-kÅ thermal oxide over silicon structure. Based on the analysis of diffraction patterns, the system operates on a wide variety of well defined line structures. By suitable choice of target, this system can also be applied to the measurement of mask-wafer overlays. The performance of the system for large numbers of samples is described and compared to the classical linear input. The signals are the same for structures having the same linewidth but produced by different processes. For some thick semiconductor structures, the edges defining the pattern boundaries have significant width themselves. Methods for measuring such struc-tures precisely by analysis of diffraction patterns are described.

Citation Download Citation

A. L. Flamholz and R. S. Charsky "Automatic Width And Overlay Measurement", Proc. SPIE 0135, Developments in Semiconductor Microlithography III, (6 September 1978); https://doi.org/10.1117/12.956122

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available