Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy

D. Rudolph; B. Niemann; G. Schmahl

doi:10.1117/12.933141

24 March 1982 Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy

D. Rudolph, B. Niemann, G. Schmahl

Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933141
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

Procedures are described to make sputtered sliced zone plates. These systems are under development for a resolution range of 10 nm ≤ d ≤ 50 nm.

Citation Download Citation

D. Rudolph, B. Niemann, and G. Schmahl "Status Of The Sputtered Sliced Zone Plates For X-Ray Microscopy", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); https://doi.org/10.1117/12.933141

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