Heterodyne Sensors Using Retardation At- Total Reflection --Displacement Sensor-

T. Yoshino; T. Hashimoto

doi:10.1117/12.967168

1 January 1987 Heterodyne Sensors Using Retardation At- Total Reflection --Displacement Sensor-

T. Yoshino, T. Hashimoto

Proceedings Volume 0813, Optics and the Information Age; (1987) https://doi.org/10.1117/12.967168
Event: 14th Congress of the International Commission for Optics, 1987, Quebec, Canada

Abstract

Noncontact and high sensitivity are the most important abilities of optical metrology. To achieve high sensitivity interference systems are most usually used, but they are generally unstable. In this paper we present a new optical sensing scheme which can sensitively and stably measure various quantities.

Citation Download Citation

T. Yoshino and T. Hashimoto "Heterodyne Sensors Using Retardation At- Total Reflection --Displacement Sensor-", Proc. SPIE 0813, Optics and the Information Age, (1 January 1987); https://doi.org/10.1117/12.967168

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