Paper
26 April 1989 Stretching Of Excimer Laser Pulses
F. VoB, U. Rebhan, P. Oesterlin, E. Muller-Horsche, W. Muckenheim
Author Affiliations +
Proceedings Volume 1023, Excimer Lasers and Applications; (1989) https://doi.org/10.1117/12.950132
Event: 1988 International Congress on Optical Science and Engineering, 1988, Hamburg, Germany
Abstract
The pulse duration of discharge-pumped excimer lasers in general assumes values between 10 and 40 ns. For several purposes, including pulse transmission through optical fibers, longer pulses are required. This can be accomplished by (i) optimizing the gas mixture aiming at longest possible pulse duration instead of maximum energy, (ii) by modifying the electric circuit of standard excimer lasers, or (iii) by designing special discharge circuits including the prepulse technology.
© (1989) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. VoB, U. Rebhan, P. Oesterlin, E. Muller-Horsche, and W. Muckenheim "Stretching Of Excimer Laser Pulses", Proc. SPIE 1023, Excimer Lasers and Applications, (26 April 1989); https://doi.org/10.1117/12.950132
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Excimer lasers

Pulsed laser operation

Optical fibers

Inductance

Laser drilling

Laser damage threshold

Mirrors

Back to Top