The small-sized ultraprecision sensor for measuring linear displacements

D. S. Lushnikov; A. Y. Zherdev; S. B. Odinokov; V. V. Markin; O. A. Gurylev; M. V. Shishova

doi:10.1117/12.2269712

26 June 2017 The small-sized ultraprecision sensor for measuring linear displacements

D. S. Lushnikov, A. Y. Zherdev, S. B. Odinokov, V. V. Markin, O. A. Gurylev, M. V. Shishova

Proceedings Volume 10329, Optical Measurement Systems for Industrial Inspection X; 103293E (2017) https://doi.org/10.1117/12.2269712
Event: SPIE Optical Metrology, 2017, Munich, Germany

Abstract

The article describes a new optical scheme of noncontact sensor for measuring linear displacement - linear encoder. This sensor is an optical device in which the measurement of displacement is performed by analyzing the optical signal, which pass through two diffraction gratings, one of which is moved relative to the other. The optical signal is obtained by the diffraction of light in these diffraction gratings and subsequent interference of diffracted beams. Often this type of sensors are multi-channel devices with symmetrically positioned of detectors. This scheme is proposed to use a multisection phase mask that allows to make a small-sized sensor. Sections of this multi-section phase mask are the optical windows and they made the final interference signals to be shifted relative to each other in phase. The number of sections in the multi-section phase mask can be varied. Estimated sufficient number of sections is four or more.

Citation Download Citation

D. S. Lushnikov, A. Y. Zherdev, S. B. Odinokov, V. V. Markin, O. A. Gurylev, and M. V. Shishova "The small-sized ultraprecision sensor for measuring linear displacements", Proc. SPIE 10329, Optical Measurement Systems for Industrial Inspection X, 103293E (26 June 2017); https://doi.org/10.1117/12.2269712

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