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21 November 2017 Microoptoelectromechanical systems for space applications
Michel de Labachelerie
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Proceedings Volume 10569, International Conference on Space Optics — ICSO 2000; 1056901 (2017) https://doi.org/10.1117/12.2307955
Event: International Conference on Space Optics 2000, 2000, Toulouse Labège, France
Abstract
This paper gives an overview of some new technologies which are currently being developed to manufacture miniature optical systems (MOEMS), and discuss their potential advantages for space applications.
© (2017) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
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Michel de Labachelerie "Microoptoelectromechanical systems for space applications", Proc. SPIE 10569, International Conference on Space Optics — ICSO 2000, 1056901 (21 November 2017); https://doi.org/10.1117/12.2307955
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KEYWORDS
Microopto electromechanical systems
Optics manufacturing
Mirrors
Wafer-level optics
Integrated optics
Manufacturing
Beam shaping
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