Employing Ni-Cr co-doping to prepare low phase transition temperature VO2 film

Qicong He; Dongping Zhang; Ying Huang; Yu Yang; Huan Guan; Jingcheng Jin; Ping Fan

doi:10.1117/12.2541404

8 July 2019 Employing Ni-Cr co-doping to prepare low phase transition temperature VO₂ film

Qicong He, Dongping Zhang, Ying Huang, Yu Yang, Huan Guan, Jingcheng Jin, Ping Fan

Proceedings Volume 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019); 110640G (2019) https://doi.org/10.1117/12.2541404
Event: Pacific Rim Laser Damage 2019 and Thin Film Physics and Applications 2019, 2019, Qingdao, China

Abstract

A new doping approach of preparing VO₂ film was proposed to significantly tune the transition phase temperature. The heavy Ni-Cr-codoped VO₂ film ultra-thin layer was deposited on the pure VO₂ film by reactive pulsed magnetron sputtering on the Si substrate followed with annealing. The microstructure, optical and phase transition performance of VO₂ films were characterized via X-ray diffraction, UV/VIS/NIR spectrophotometer and thin film phase transition measurement system, respectively. The result indicates that the transition phase temperature of VO₂ film can be reduced from 53 ℃ to 30 ℃ by easily controlling different doping time.

Citation Download Citation

Qicong He, Dongping Zhang, Ying Huang, Yu Yang, Huan Guan, Jingcheng Jin, and Ping Fan "Employing Ni-Cr co-doping to prepare low phase transition temperature VO₂ film", Proc. SPIE 11064, Tenth International Conference on Thin Film Physics and Applications (TFPA 2019), 110640G (8 July 2019); https://doi.org/10.1117/12.2541404

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