Direct laser writing of submicrometric voxels in two-photon photopolymerization

Yahya Bougdid; Youssef El Idrissi; Imad Maouli; Zouheir Sekkat

doi:10.1117/12.2528439

30 August 2019 Direct laser writing of submicrometric voxels in two-photon photopolymerization

Yahya Bougdid, Youssef El Idrissi, Imad Maouli, Zouheir Sekkat

Proceedings Volume 11098, Molecular and Nano Machines II; 110980G (2019) https://doi.org/10.1117/12.2528439
Event: SPIE Organic Photonics + Electronics, 2019, San Diego, California, United States

Abstract

Direct laser writing based on two-photon polymerization is one of the most advanced techniques to fabricate multifunctionally advanced micro- devices. The voxel is considered as a feature key to control the resolution of the fabricated microstructures. The fabricated voxel can be much smaller than the cube of the laser wavelength, λ³ . To achieve a high resolution, it is known from a long literature that low laser intensity is needed. Oppositely, we introduce a new approach to control the spatial resolution by combining high laser intensity and fast writing speed. By using this approach, a resolution of ~36 𝑛𝑚, e.g. ~1/21 λ, is achieved. In this paper, we investigate on the improvement of the spatial resolution by using a systematic nanofabrication process which we developed. We discuss the factors influencing the resolution, including the laser intensity, the exposure time and the scanning speed by fabricating polymerized- voxels, nanolines and suspended nanofibers connecting two voxels. Lastly, we have fabricated stable 3D microstructures with a sub-diffraction-limit accuracy.

Conference Presentation

Citation Download Citation

Yahya Bougdid, Youssef El Idrissi, Imad Maouli, and Zouheir Sekkat "Direct laser writing of submicrometric voxels in two-photon photopolymerization", Proc. SPIE 11098, Molecular and Nano Machines II, 110980G (30 August 2019); https://doi.org/10.1117/12.2528439

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