Ultrashort-pulse laser micro-polishing of lithium niobate by using UV-ps pulses

Mareike Schäfer; Johannes L'huillier

doi:10.1117/12.2546493

2 March 2020 Ultrashort-pulse laser micro-polishing of lithium niobate by using UV-ps pulses

Proceedings Volume 11268, Laser-based Micro- and Nanoprocessing XIV; 112680R (2020) https://doi.org/10.1117/12.2546493
Event: SPIE LASE, 2020, San Francisco, California, United States

Abstract

We present a new fabrication method to realize smooth structures in lithium niobate. Therefore a detailed study on laser micro-polishing using ultrashort laser pulses is carried out by separating the effects of spatial pulse overlap and temporal pulse overlap. The adventage of this approach is the smoothing of the processed area by a simultaneous ablation. That will allow ablation depths between 1 µm and 4 µm with rms-roughness values of ≈20 nm.

Conference Presentation

Citation Download Citation

Mareike Schäfer and Johannes L'huillier "Ultrashort-pulse laser micro-polishing of lithium niobate by using UV-ps pulses", Proc. SPIE 11268, Laser-based Micro- and Nanoprocessing XIV, 112680R (2 March 2020); https://doi.org/10.1117/12.2546493

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