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In this work, we study the nonlinear dynamics of two elastically coupled micro-membranes. These MHz-resonators are capacitively driven by a pair of integrated interdigitated electrodes. Each membrane is suspended over a 350 nm air gap constituting a Fabry-Pérot cavity used to optomechanically read-out its displacement with a 633 nm laser. The linear regime analysis of the system reveals a strong constitutive difference of the resonators natural frequencies as well as a weak coupling regime. The system is strongly driven to reach a nonlinear regime that is described with a two coupled Duffing resonators model. We report the emergence of classical chaos when the resonant driving force is modulated with a low frequency (kHz) pump. The experimental bifurcation diagrams corresponding to the change of low frequency pump and amplitude of this modulation are numerically reproduced. We discuss the dissipative aspect of the problem that plays a crucial role in the pump frequency range allowing the chaotic regimes to be reached. This system constitutes an interesting base for the fundamental investigation of the collective dynamics of an array of nonlinear resonators. Additionally, our bifurcation diagrams exhibits several brutal dynamical changes often referred as “extreme events”. We consider using these highly sensitive points in the parameters space as working points for chaos based sensing applications.
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