Visual detection method for installation error of grating measurement system

Wei Chen; Xiaohui Ma; Shuhang Li

doi:10.1117/12.2574910

5 November 2020 Visual detection method for installation error of grating measurement system

Wei Chen, Xiaohui Ma, Shuhang Li

Proceedings Volume 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing; 1156805 (2020) https://doi.org/10.1117/12.2574910
Event: Applied Optics and Photonics China (AOPC 2020), 2020, Beijing, China

Abstract

In order to complete the detection of small displacements, the principle of grating diffraction interference is used to convert the displacement of the measured target into the change of the light and dark of the fringes after interference. The displacement information is estimated by detecting the change in light intensity. However, this method requires high optical path symmetry and complicated installation. In this regard, by modifying the optical path and using the principle of interference, this article enlarges and visualizes the installation error. Thereby reducing the complexity of installation and adjustment, and improving the accuracy of installation and adjustment.

Citation Download Citation

Wei Chen, Xiaohui Ma, and Shuhang Li "Visual detection method for installation error of grating measurement system", Proc. SPIE 11568, AOPC 2020: Optics Ultra Precision Manufacturing and Testing, 1156805 (5 November 2020); https://doi.org/10.1117/12.2574910

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