Machining of [100], [110] and [111] oriented silicon with ultrashort laser pulses in the NIR

Beat Neuenschwander; Stefan M. Remund; Christoph Wildbolz; Michalina V. Chaja

doi:10.1117/12.2582661

5 March 2021 Machining of [100], [110] and [111] oriented silicon with ultrashort laser pulses in the NIR

Beat Neuenschwander, Stefan M. Remund, Christoph Wildbolz, Michalina V. Chaja

Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 116730N (2021) https://doi.org/10.1117/12.2582661
Event: SPIE LASE, 2021, Online Only

Abstract

[100], [110] and [111] oriented silicon shows different behavior when it is machined with 10 ps pulses in the NIR. For the [100] orientation the roughness increases to 2.8 µm when the peak fluence is raised to 1.6 J/cm2 then drops down to a value below 200 nm for a fluence of 2 J/cm2 and stays below 300nm for fluences up to 7.5 J/cm2. For the other orientations a completely different behavior is observed. The roughness constantly increases to 900 nm at 1.6 J/cm2 and then further to about 8 µm for a peak fluence of 7.5 J/cm2.

Conference Presentation

Citation Download Citation

Beat Neuenschwander, Stefan M. Remund, Christoph Wildbolz, and Michalina V. Chaja "Machining of [100], [110] and [111] oriented silicon with ultrashort laser pulses in the NIR", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 116730N (5 March 2021); https://doi.org/10.1117/12.2582661

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available