Ultra-short pulses at high average power in the Laser MicroJet

Michalina W. Chaja; Gregoire Laporte; Peter Cam; Stefan Remund; Beat Neuenschwander

doi:10.1117/12.2585550

24 March 2021 Ultra-short pulses at high average power in the Laser MicroJet

Michalina W. Chaja, Gregoire Laporte, Peter Cam, Stefan Remund, Beat Neuenschwander

Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 1167319 (2021) https://doi.org/10.1117/12.2585550
Event: SPIE LASE, 2021, Online Only

Abstract

The commercially available Synova Laser MicroJet® technology combines conventional laser capabilities with compressed water jet that precisely guide laser beam in a similar manner to optical fibers. Due to physical water breakdown, technology is typically focused on the nanosecond pulse duration range. A stable beam shaping setup with a diffusor and commercial fiber to couple into water jet, was developed allowing to test Laser MicroJet® at 100-300 ps pulse duration. The change to energy intensity profile with diffuser allowed to triple coupled energy without inducing the physical breakdown in water and could be further increased by implementing 2 and 3 pulse bursts into the setup. High quality scribing was achieved at Si wafer at high scanning speed. Preliminary results on multilayer Si-wafer have demonstrated that scribing quality is in this case more feedrate dependent, limited chipping occurring at speed of commercial interest. Cutting tests were performed on semiconductors as well as on metals. On both, it was possible to achieve high quality cuts with high feedrate up to 12 mm/s with Ra < 0,3 μm.

Conference Presentation

Citation Download Citation

Michalina W. Chaja, Gregoire Laporte, Peter Cam, Stefan Remund, and Beat Neuenschwander "Ultra-short pulses at high average power in the Laser MicroJet", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 1167319 (24 March 2021); https://doi.org/10.1117/12.2585550

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available