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In order to improve the ability of ion beam polishing efficiency and shape modification. In order to solve the problem of low polishing convergence ratio in particular, we use different beam diameters and peak removal rates of removal functions to simulate polishing process and efficiency. MATLAB tool was used to accurately fit the removal functions, and a mathematical model of ion beam simulation polishing was established to simulate the removal characteristics of ion beams with different beam diameters under different superposition spacing. A series of simulation results with different residence time distribution and residual precision were obtained by optimizing the polishing simulation algorithm, and the simulation rules were analyzed to select the most appropriate aperture and overlay spacing. Polishing simulation analysis can not only optimize residence time distribution, but also reduce machining time. It can also optimize the processing technology to achieve pre-processing prediction and achieve higher polishing efficiency while achieving the target accuracy requirements. On the basis of simulation, we polished φ120mm fused quartz flat samples with initial surface shape PV of 1079.59nm and RMS of 304.95nm. After 11 hours of polishing, the shape accuracy PV were 95.63nm, the RMS is 8.99nm, and the mean square value convergence ratio of the surface shape reaches 33.92.This simulation approach provides a effective guidance for ion beam high precision and efficiency polishing.
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