Research on large-scale plane coordinate measurement technology based on multi-axis synchronous laser interferometry

Shuhui Wang; Shuanghua Sun; Yanhui Kang; Fumin Zhang; Heyan Wang; Changjuan Lao

doi:10.1117/12.2586486

12 March 2021 Research on large-scale plane coordinate measurement technology based on multi-axis synchronous laser interferometry

Shuhui Wang, Shuanghua Sun, Yanhui Kang, Fumin Zhang, Heyan Wang, Changjuan Lao

Author Affiliations +

Proceedings Volume 11763, Seventh Symposium on Novel Photoelectronic Detection Technology and Applications; 1176335 (2021) https://doi.org/10.1117/12.2586486
Event: Seventh Symposium on Novel Photoelectronic Detection Technology and Application 2020, 2020, Kunming, China

Abstract

In order to solve the problem of low precision in calibration and measurement of large size optical measuring instruments, mask, and other two-dimensional grid standards, a large size(1m × 1m) plane coordinate measuring method based on multi-axis laser interferometer is studied. Use a cube-corner prism as a reflector. Using a fixed bridge measuring machine structure, the co-planar motion is disassembled into independent X-axis movable table motion and Y-directional slider motion on the beam. Geometrical error modeling analysis is carried out on the measuring machine, and optical path spectral layout of multi-axis laser interferometry is studied. In order to monitor the deflection of the X-direction moving platform in real time, use two-channel laser interference to measure the length in the X-direction and a single-channel measurement of the Y-direction slider movement. Finally, a laser interferometry model with large plane coordinates is proposed and a motion simulation analysis is carried out for the deviation of X-axis mobile platform around Z axis, to verify the validity and necessity of real-time monitoring compensation error of double optical path for plane coordinates measurement.

Citation Download Citation

Shuhui Wang, Shuanghua Sun, Yanhui Kang, Fumin Zhang, Heyan Wang, and Changjuan Lao "Research on large-scale plane coordinate measurement technology based on multi-axis synchronous laser interferometry", Proc. SPIE 11763, Seventh Symposium on Novel Photoelectronic Detection Technology and Applications, 1176335 (12 March 2021); https://doi.org/10.1117/12.2586486

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