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ISP SYSTEM designs and manufactures deformable mirrors dedicated to intense lasers for 15 years. The design patented by ISP uses electro-mechanical actuators and allows high order optical correction with a very high stability even unpowered. It can be adapted to any laser beam size and shape and membrane can be easily replaced. Laser peak-power increases continuously thanks to higher energy and shorter pulse duration, repetition rates are more and more important, leading to new technical challenges: high damage threshold for coatings, increased beam size, higher average power absorbed by the optics. ISP SYSTEM has improved continuously his deformable mirror in order to fulfill these requirements. Aperture has been increased using larger thin substrates and larger coating chambers for these substrates but keeping an acceptable actuator quantity. Optical test bench for calibration has also been upgraded for beams up to Ø500mm. Outgassing rates and cleanliness have been improved thanks to new materials, new lubricants and new cleaning processes coming from space and semiconductor industries. Outgassing of complete deformable mirror can be measured thanks to Rest Gas Analysis. Actuators have been improved in term of resolution, foot print and actuation speed. Actuators with very small diameter have been designed in order to increase the actuator density and improve the correction of high order Zernike. An active cooled deformable mirror is under development for applications with high average power of the laser beams up to 30 kW. This active cooled version is based on a technology similar to the standard deformable mirrors designed by ISP System and thus takes advantage of the electromechanical actuators benefits. It is adapted to CW and high repetition rate lasers and it is designed to able to dissipate continuously a thermal power of 300W. Optical correction quality is similar to the standard deformable mirror. Outgassing rates and cleanliness have been improved thanks to new materials, new lubricants and new cleaning processes coming from space and semiconductor industries. Outgassing of complete deformable mirror can be measured thanks to Rest Gas Analysis. Actuators have been improved in term of resolution, foot print and actuation speed. Actuators with very small diameter have been designed in order to increase the actuator density and improve the correction of high order Zernike. An active cooled deformable mirror is under development for applications with high average power of the laser beams up to 30 kW. This active cooled version is based on a technology similar to the standard deformable mirrors designed by ISP System and thus takes advantage of the electromechanical actuators benefits. It is adapted to CW and high repetition rate lasers and it is designed to able to dissipate continuously a thermal power of 300W. Optical correction quality is similar to the standard deformable mirror.
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