Atmospheric plasma jet machining of an optical element made from borosilicate crown glass

Heike Müller; Georg Böhm; Thomas Arnold

doi:10.1117/12.2593591

7 June 2021 Atmospheric plasma jet machining of an optical element made from borosilicate crown glass

Heike Müller, Georg Böhm, Thomas Arnold

Proceedings Volume 11853, Eighth European Seminar on Precision Optics Manufacturing; 1185303 (2021) https://doi.org/10.1117/12.2593591
Event: Eighth European Seminar on Precision Optics Manufacturing, 2021, Teisnach, Germany

Abstract

Atmospheric Plasma Jet Machining is performed on Borosilicate Crown Glass. A fluorine containing plasma jet is suitable for the etching of the material. A substrate surface temperature of about 325°C during processing is necessary for a controlled removal. The figure error can be corrected by a dwell time based deterministic process. The resulting surface roughness depends on the surface temperature of the processed sample.

Citation Download Citation

Heike Müller, Georg Böhm, and Thomas Arnold "Atmospheric plasma jet machining of an optical element made from borosilicate crown glass", Proc. SPIE 11853, Eighth European Seminar on Precision Optics Manufacturing, 1185303 (7 June 2021); https://doi.org/10.1117/12.2593591

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