A wide-spectrum plug-and-play Fizeau interferometric system

Qi Lu; Xu Zhang; Yunbo Bai; Ying Sun; Shijie Liu; Jianda Shao

doi:10.1117/12.2603720

11 October 2021 A wide-spectrum plug-and-play Fizeau interferometric system

Qi Lu, Xu Zhang, Yunbo Bai, Ying Sun, Shijie Liu, Jianda Shao

Proceedings Volume 11899, Optical Metrology and Inspection for Industrial Applications VIII; 118990Q (2021) https://doi.org/10.1117/12.2603720
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Abstract

In this paper, we present a wide-spectrum plug-and-play Fizeau interferometric system, which can complete precision interferometric measurement at any wavelength in the range of 600-1600 nm with a maximum measurement aperture of 150 mm. The system can be designed with multiple optical fiber input terminals, different wavelengths share only one set of interferometric system, and no components need to be adjusted when switching the working wavelength. The development of the system is helpful to accurately measure the surface profile error of coated optical elements at a specified wavelength.

Citation Download Citation

Qi Lu, Xu Zhang, Yunbo Bai, Ying Sun, Shijie Liu, and Jianda Shao "A wide-spectrum plug-and-play Fizeau interferometric system", Proc. SPIE 11899, Optical Metrology and Inspection for Industrial Applications VIII, 118990Q (11 October 2021); https://doi.org/10.1117/12.2603720

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available