A low-cost mid-infrared polarizer with double-sided silica anti-reflection films fabricated using nanoimprint

Xiangwei Zeng; Xingsheng Hao; Yahong Li; Jinkui Chu; Xiangnan Qiao; Ran Zhang

doi:10.1117/12.2600907

24 November 2021 A low-cost mid-infrared polarizer with double-sided silica anti-reflection films fabricated using nanoimprint

Xiangwei Zeng, Xingsheng Hao, Yahong Li, Jinkui Chu, Xiangnan Qiao, Ran Zhang

Author Affiliations +

Proceedings Volume 12061, AOPC 2021: Infrared Device and Infrared Technology; 1206103 (2021) https://doi.org/10.1117/12.2600907
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

To make a low-cost and effective infrared polarizer, we designed a mid-infrared polarizer with double-sided silica anti-reflection films. Double-sided silica was oxidized on a silicon substrate. Then, micro gratings were fabricated on silica by using soft nanoimprint lithography and metal thermal evaporation process. The transverse magnetic wave (TM) transmittance exceeds 70% in the wavelength range of 2.56-2.95μm and 3.93-4.97μm. The extinction ratio exceeds 20dB in 2.5-5.5μm band. The mid-infrared polarizer has potential applications in fields such as polarization detection, communication, and spectral analysis.

Citation Download Citation

Xiangwei Zeng, Xingsheng Hao, Yahong Li, Jinkui Chu, Xiangnan Qiao, and Ran Zhang "A low-cost mid-infrared polarizer with double-sided silica anti-reflection films fabricated using nanoimprint", Proc. SPIE 12061, AOPC 2021: Infrared Device and Infrared Technology, 1206103 (24 November 2021); https://doi.org/10.1117/12.2600907

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