Fast and high precision alignment of off-axis reflective optical system

Chunyu Wang; Cong Wang; Jinchuan Niu; Yinglong Zhao; Shengjie Zhang; Xiaohan Du; Yang Huang; Chao Zhang; Chengguang Cui

doi:10.1117/12.2606136

24 November 2021 Fast and high precision alignment of off-axis reflective optical system

Chunyu Wang, Cong Wang, Jinchuan Niu, Yinglong Zhao, Shengjie Zhang, Xiaohan Du, Yang Huang, Chao Zhang, Chengguang Cui

Proceedings Volume 12065, AOPC 2021: Optical Sensing and Imaging Technology; 1206521 (2021) https://doi.org/10.1117/12.2606136
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

To realize the fast, high-quality alignment of off-axis reflective system, a computer-aided alignment method based on high-precision extraction of optical axis and high- precision restoration of surface shape of off-axis mirror was proposed. The optical axes of the mirrors are derived by means of a zero-position compensation detection path of the off-axis mirrors, and accuracy is better than 6", realize more rapid and accurate system initial alignment. There propose a surface shape data conversion algorithm, combined with Code V, it can realize the high-precision restoration of measured surface shape data of off-axis mirror in simulation, accurately calculate and separate the influence of shape error and position misalignment on system quality, and realize the fast and high precision alignment of off-axis reflective system. This method is applied to the practical alignment of one off-axis TMA system, wave aberration RMS≤0.084λ(λ=632.8nm) after initial alignment of the system. After only once calculation and alignment, full field RMS≤0.055λ. The experiment results demonstrate that this method is feasible.

Citation Download Citation

Chunyu Wang, Cong Wang, Jinchuan Niu, Yinglong Zhao, Shengjie Zhang, Xiaohan Du, Yang Huang, Chao Zhang, and Chengguang Cui "Fast and high precision alignment of off-axis reflective optical system", Proc. SPIE 12065, AOPC 2021: Optical Sensing and Imaging Technology, 1206521 (24 November 2021); https://doi.org/10.1117/12.2606136

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