Fabry-Perot cavity filled with PDMS for high sensitivity gas pressure sensor

Yuan Wang; Jiang Chao; Xiaoshan Guo; Simei Sun; Huiling Huang; Hailin Chen; Jiao Song

doi:10.1117/12.2624271

20 January 2022 Fabry-Perot cavity filled with PDMS for high sensitivity gas pressure sensor

Yuan Wang, Jiang Chao, Xiaoshan Guo, Simei Sun, Huiling Huang, Hailin Chen, Jiao Song

Proceedings Volume 12154, 13th International Photonics and OptoElectronics Meetings (POEM 2021); 1215402 (2022) https://doi.org/10.1117/12.2624271
Event: 13th International Photonics and OptoElectronics Meetings (POEM 2021), 2021, Wuhan, China

Abstract

A novel gas pressure sensor is designed and demonstrated experimentally, which is composed of a Fabry–Perot cavity based on a quartz capillary filled with polydimethylsiloxane (PDMS). The PDMS has excellent elasticity and is an ideal material for gas pressure sensing. The experimental results show that the sensor has a high sensitivity as the gas pressure increases (or decreases). When the gas pressure rises, the maximum sensitivity reaches the -15.95 nm/MPa. When the gas pressure drops, the maximum sensitivity reaches -23.1 nm/MPa. Experimental results show that there are large differences in the sensor sensitivity when the gas pressure rises or decreases, which may be related to the characteristics of the PDMS. The designed sensors have the advantages of simple and compact structure, low cost and high sensitivity, and have certain application prospects in engineering practice.

Citation Download Citation

Yuan Wang, Jiang Chao, Xiaoshan Guo, Simei Sun, Huiling Huang, Hailin Chen, and Jiao Song "Fabry-Perot cavity filled with PDMS for high sensitivity gas pressure sensor", Proc. SPIE 12154, 13th International Photonics and OptoElectronics Meetings (POEM 2021), 1215402 (20 January 2022); https://doi.org/10.1117/12.2624271

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