Fabrication of large-vector height aspheric microlens via tool swing stitching processing

Tianxing Wang; Tianfeng Zhou; Jia Zhou; Benshuai Ruan; Wenxiang Zhao; Xibin Wang

doi:10.1117/12.2616840

15 February 2022 Fabrication of large-vector height aspheric microlens via tool swing stitching processing

Tianxing Wang, Tianfeng Zhou, Jia Zhou, Benshuai Ruan, Wenxiang Zhao, Xibin Wang

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 121663M (2022) https://doi.org/10.1117/12.2616840
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

Microlens elements are widely applied in various beam processing applications. However, due to the geometric limitations of the cutting tool and the degrees of freedom of the machine tool, the traditional cutting strategy cannot be employed to fabricate high quality large-vector height microlens. In this paper, a method based on the tool swing cutting and stitching processing is presented. The interference situation and the relationship between the tool parameters and microlens vector height are analyzed. The analysis shows that this method can improve the microlens vector height by about 2 times compared to the slow tool servo. Then the influence of tool setting error on stitching accuracy is studied, and an accurate tool setting method combining CCD tool setting and trial cutting is proposed. Finally, the microlens are experimentally machined to reveal that this method is possible to fabricate microlens with large-vector height and high surface quality.

Citation Download Citation

Tianxing Wang, Tianfeng Zhou, Jia Zhou, Benshuai Ruan, Wenxiang Zhao, and Xibin Wang "Fabrication of large-vector height aspheric microlens via tool swing stitching processing", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 121663M (15 February 2022); https://doi.org/10.1117/12.2616840

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KEYWORDS

Microlens

Spindles

Aspheric lenses

Charge-coupled devices

Servomechanisms

Diamond

Diamond machining

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