The relationship between dynamic performance of ion beam figuring equipment and optical surface accuracy

Yongbin Wang; Yifan Dai; Hao Hu; Shuai Xue; Jiahui Bao

doi:10.1117/12.2624743

27 March 2022 The relationship between dynamic performance of ion beam figuring equipment and optical surface accuracy

Yongbin Wang, Yifan Dai, Hao Hu, Shuai Xue, Jiahui Bao

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 121696C (2022) https://doi.org/10.1117/12.2624743
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

Sub-nanometer precision optical components are widely used in optical systems. As the key equipment of sub-nanometer precision calculation, the dynamic performance of ion beam figuring equipment is very important. However, most studies have focused on optimizing ion beam figuring processes; However, the research on the dynamic performance of machine tools with sub-nanometer precision is not sufficient and comprehensive. At present, most of the research is limited to the analysis of plane machining, that is, only the dynamic performance of the scanning axis is analyzed. As the surface shape changes from plane to surface, the accuracy requirement is from nanometer to sub-nanometer, so the influence of the scanning axis cannot be simply considered. The dynamic performance of the target distance axis of three-axis ion beam figuring equipment under different surface shape characteristics and removal function characteristics of the sub-nanometer machining process was analyzed theoretically and simulated. The results of this study can promote the application of three-axis ion beam figuring equipment in the manufacture of complex surfaces and high-precision optical components.

Citation Download Citation

Yongbin Wang, Yifan Dai, Hao Hu, Shuai Xue, and Jiahui Bao "The relationship between dynamic performance of ion beam figuring equipment and optical surface accuracy", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 121696C (27 March 2022); https://doi.org/10.1117/12.2624743

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KEYWORDS

Ion beams

Ion beam finishing

Performance modeling

Motion models

Optical components

Optics manufacturing

Analytical research

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