Design of integrated broadband vanadium dioxide hybrid plasmonic modulator

Li Ding; Jin Guo; Jun Wang; Zongming Duan; Zhixiang Huang

doi:10.1117/12.2624813

27 March 2022 Design of integrated broadband vanadium dioxide hybrid plasmonic modulator

Li Ding, Jin Guo, Jun Wang, Zongming Duan, Zhixiang Huang

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 121696N (2022) https://doi.org/10.1117/12.2624813
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

With increasing demands in all-optical signal processing functions such as switching and modulating in integrated photonic-electronic circuits, plasmonic modulators are getting lots of attentions. In this paper, we present a novel design of hybrid plasmonic modulator based on insulator-metal phase transition in vanadium dioxide (VO2). The device consists of two silicon tapers and a metal-VO2-insulator-silicon hybrid plasmonic structure that are inserted into a strip silicon waveguide, with 120 nm x 800 nm modulating section within 450 nm x 2 μm device footprint. By taking advantages of the large refractive index contrast between the metal and semiconductor phase of VO2, the proposed modulator achieves a high modulation depth of 14.852 dB with a low insertion loss of 1.804 dB. Moreover, we have systematically analyzed the geometry dependence of the device and the influence of broadband light on modulation performances. Considering the effects of seed layer in VO2 deposition process, we have also studied the modulating performances using different dielectric layers. Our design can be practically fabricated, and a complete process flow is provided. We believe this work has great values in promoting the industrial process of silicon photonics in the fields of optical communication and data storage.

Citation Download Citation

Li Ding, Jin Guo, Jun Wang, Zongming Duan, and Zhixiang Huang "Design of integrated broadband vanadium dioxide hybrid plasmonic modulator", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 121696N (27 March 2022); https://doi.org/10.1117/12.2624813

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