Research on sensing based on rectangular connected semi-circular cavity structure

Jing Ma; Tiezhu Bo; Chen Wang

doi:10.1117/12.2627374

28 March 2022 Research on sensing based on rectangular connected semi-circular cavity structure

Jing Ma, Tiezhu Bo, Chen Wang

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 12169CP (2022) https://doi.org/10.1117/12.2627374
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

Metal-Insulator-Metal (MIM) waveguide structure is a typical surface plasmon waveguide structure. It is considered to be used in micro nano optics because of its strong mode field limitation, low transmission loss and long electromagnetic wave transmission distance The field of components and integrated circuits has a vigorous development prospect. In this paper, a new MIM waveguide coupled surface plasmon structure of rectangular connected semi-circular cavity is proposed. The wide continuous state of the straight waveguide with a metal slit interferes with the narrow-band discrete state of the rectangular connected semi-circular cavity to produce three sharp Fano resonance lines. As a refractive index sensor, the maximum sensitivity is 1100nm/RIU and the quality factor is 6900. Then, a MIM surface plasmon structure is improved to produce a triple Fano resonance effect. When the new structure is used as refractive index sensor, the sensitivity reaches 1190nm/RIU and the FOM value of formant is 7000.

Citation Download Citation

Jing Ma, Tiezhu Bo, and Chen Wang "Research on sensing based on rectangular connected semi-circular cavity structure", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 12169CP (28 March 2022); https://doi.org/10.1117/12.2627374

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