Low-loss sputter coated aluminum nitride waveguides

S. Mardani; W. A. P. M. Hendriks; M. Dijkstra; S. M. Garcia-Blanco

doi:10.1117/12.2656323

17 March 2023 Low-loss sputter coated aluminum nitride waveguides

S. Mardani, W. A. P. M. Hendriks, M. Dijkstra, S. M. Garcia-Blanco

Proceedings Volume 12424, Integrated Optics: Devices, Materials, and Technologies XXVII; 1242403 (2023) https://doi.org/10.1117/12.2656323
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Photonic integrated circuits (PICs) have experienced an exponential growth in a number of applications, including telecom/datacom, LiDAR, optical sensing/metrology and quantum technology. Most materials and platforms commonly used in integrated photonics, such as silicon-on-insulator (SOI), silicon nitride (Si₃N₄) and indium phosphide (InP) do not show transmission below ~400 nm, hindering the development of PICs operating in the ultraviolet wavelength range. Furthermore, devices in this wavelength range also require fast modulation and switching in order to enable complex emerging applications. Aluminum nitride (AlN) is a material with a band gap of 6.2 eV, exhibiting a wide transparency window, from the ultraviolet to the mid-infrared. AlN has the capacity to achieve high electro-optic[1], non-linear[2] and piezo-electric[3,4] coefficients, which makes AlN an interesting material for PICs with operation down to the ultraviolet wavelength range. However, high losses have prevented PICs from benefiting from its excellent optical properties. In this work, we present our work on the sputter deposition of low-loss AlN slab waveguides. The optical performance of AlN sputtered slab waveguides after annealing at different temperatures and their relation with the film morphology will be discussed. Preliminary slab propagation losses as low as 1.5 dB/cm at 633 nm of wavelength have been demonstrated.

Conference Presentation

Citation Download Citation

S. Mardani, W. A. P. M. Hendriks, M. Dijkstra, and S. M. Garcia-Blanco "Low-loss sputter coated aluminum nitride waveguides", Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 1242403 (17 March 2023); https://doi.org/10.1117/12.2656323

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available