MEMS-based indirect time-of-flight scanning LiDAR with parallel-phase demodulation and multipath interference suppression

Sung-Hyun Lee; Yoon-Seop Lim; Sung-Jin Cheong; Yong-Hwa Park

doi:10.1117/12.2649693

15 March 2023 MEMS-based indirect time-of-flight scanning LiDAR with parallel-phase demodulation and multipath interference suppression

Sung-Hyun Lee, Yoon-Seop Lim, Sung-Jin Cheong, Yong-Hwa Park

Author Affiliations +

Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII; 124340L (2023) https://doi.org/10.1117/12.2649693
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

This paper suggests a MEMS-based indirect time-of-flight (ToF) scanning light detection and ranging (LiDAR) system with parallel-phase demodulation. Based on the parallel-phase demodulation which extremely reduces the integration time maintaining high demodulation contrast, the proposed LiDAR can acquire accurate depth images with mean absolute error (MAE) about 1.5 cm at the distance of 1.85 m using 20 mW laser power. Meanwhile, MAE due to multipath interference (MPI) of the proposed LiDAR originally about 1.5 cm could be further reduced to less than 8 mm using support vector regression (SVR).

Conference Presentation

Citation Download Citation

Sung-Hyun Lee, Yoon-Seop Lim, Sung-Jin Cheong, and Yong-Hwa Park "MEMS-based indirect time-of-flight scanning LiDAR with parallel-phase demodulation and multipath interference suppression", Proc. SPIE 12434, MOEMS and Miniaturized Systems XXII, 124340L (15 March 2023); https://doi.org/10.1117/12.2649693

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available