A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for vibration-assisted Atomic Force Microscopic (AFM) based nanopatterning

Zimo Wang; Xinchen Wang; Huimin Zhou; Jia Deng

doi:10.1117/12.2658809

25 April 2023 A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for vibration-assisted Atomic Force Microscopic (AFM) based nanopatterning

Zimo Wang, Xinchen Wang, Huimin Zhou, Jia Deng

Author Affiliations +

Proceedings Volume 12490, Surface Engineering and Forensics; 1249006 (2023) https://doi.org/10.1117/12.2658809
Event: SPIE Smart Structures + Nondestructive Evaluation, 2023, Long Beach, California, United States

Abstract

The atomic force microscope (AFM)-based nanomachining has the potential for highly customized nanofabrication due to its low cost and tunability. However, the low productivity and issues related to the quality assurance for AFM-based nanomachining impede it from large-scale production due to the extensive experimental study for turning process parameters with time-consuming offline characterizations. This work reports an analytic approach to capturing the AE spectral frequency responses from the nanopatterning process using vibration-assisted AFM-based nanomachining. The experimental case study suggests the presented approach allows characterizations of subtle variations on the AE frequency responses during the nanomachining processes (with overall 93% accuracy), which opens up the chance to explain the variations of the nano-dynamics using the senor-based monitoring approach for vibration-assisted AFM-based nanomachining.

Conference Presentation

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Zimo Wang, Xinchen Wang, Huimin Zhou, and Jia Deng "A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for vibration-assisted Atomic Force Microscopic (AFM) based nanopatterning", Proc. SPIE 12490, Surface Engineering and Forensics, 1249006 (25 April 2023); https://doi.org/10.1117/12.2658809

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