Corrosion resistance environment durable SWIR-MWIR AR coatings

Yongli Xu; Nick Bredberg; Jason Ballou; Jue Wang; Lance Kim

doi:10.1117/12.2663354

14 June 2023 Corrosion resistance environment durable SWIR-MWIR AR coatings

Yongli Xu, Nick Bredberg, Jason Ballou, Jue Wang, Lance Kim

Proceedings Volume 12530, Advanced Optics for Imaging Applications: UV through LWIR VIII; 125300D (2023) https://doi.org/10.1117/12.2663354
Event: SPIE Defense + Commercial Sensing, 2023, Orlando, Florida, United States

Abstract

In recent years, applied optics has been pushed into two opposite directions, deep ultraviolet (DUV)/extreme ultraviolet (EUV) for semiconductors, and infrared (IR) for infrared optics. To increase resolution, coatings are critical for IR optics on various IR transparent substrates. Outer window coatings pose a huge challenge in meeting severe environmental conditions including corrosion resistance, mechanical durability, or even biological threats. In this research, AR antireflective (AR) coatings for short wavelength to mid-wavelength IR (SWIR-MWIR) applications on IR transparent substrates were developed through physical vapor deposition (PVD) processes. By careful materials selection and processes tunning, Corning has developed a coating that can pass durability tests in severe conditions including fluid, ozone, bacteria, and enhanced humidity exposure. The developed coating has successfully passed corrosion resistance of SO₂ salt-fog test for 168 hrs (7days) and H₂SO₄+salt-fog solution test for 672 hrs (28days) without degradation optically and mechanically. Atomic force microscope (AFM) data show that the RMS roughness is greatly reduced after corrosion testing and the surface is smoother with less scatter centers, which is consistence with transmission improvement. Time-of- Flight Secondary Ion Mass Spectrometry (ToF-SIMS) data confirms no degradation after SO₂ salt fog corrosive testing for 168Hrs. The success of this super-durable coating development was dependent upon dense, low defect, stress balanced, and chemically inert selection of the material system of SiO₂/Si.

Conference Presentation

Citation Download Citation

Yongli Xu, Nick Bredberg, Jason Ballou, Jue Wang, and Lance Kim "Corrosion resistance environment durable SWIR-MWIR AR coatings", Proc. SPIE 12530, Advanced Optics for Imaging Applications: UV through LWIR VIII, 125300D (14 June 2023); https://doi.org/10.1117/12.2663354

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