Evaluation of the ventilation mode in an ISO class six electronic cleanroom by the AHP-entropy weight method

Gang Han; Guozeng Feng; Cheng Chen; Chongyao Pan; Weiming Zhou

doi:10.1117/12.2681828

16 June 2023 Evaluation of the ventilation mode in an ISO class six electronic cleanroom by the AHP-entropy weight method

Gang Han, Guozeng Feng, Cheng Chen, Chongyao Pan, Weiming Zhou

Author Affiliations +

Proceedings Volume 12639, Third International Conference on Mechanical Design and Simulation (MDS 2023); 126391A (2023) https://doi.org/10.1117/12.2681828
Event: Third International Conference on Mechanical Design and Simulation (MDS 2023), 2023, Xi'an, China

Abstract

In this paper, computational fluid dynamics (CFD) was used to numerically simulate four ventilation modes of ISO class six clean room, to explore the effects of different FFU-clean bench coverage rates on the temperature and humidity in the clean room, and to establish a hierarchical analysis (AHP) entropy weight evaluation system to determine the best coverage rate (C). The results show that the temperature difference, relative humidity difference and airflow velocity difference increase with the increase of coverage rate; when the coverage rate C=25%, the thermal comfort and cleanliness of employees are satisfied with priority; when the coverage rate C=50%, the high energy efficiency of the ventilation system is achieved.

Citation Download Citation

Gang Han, Guozeng Feng, Cheng Chen, Chongyao Pan, and Weiming Zhou "Evaluation of the ventilation mode in an ISO class six electronic cleanroom by the AHP-entropy weight method", Proc. SPIE 12639, Third International Conference on Mechanical Design and Simulation (MDS 2023), 126391A (16 June 2023); https://doi.org/10.1117/12.2681828

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