Light source options for optical metrology

Kevin Harding

doi:10.1117/12.2675054

4 October 2023 Light source options for optical metrology

Kevin Harding

Proceedings Volume 12672, Applied Optical Metrology V; 126720B (2023) https://doi.org/10.1117/12.2675054
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States

Abstract

Optical metrology methods such as structured light, triangulation and diffractive methods all rely on the properties of the light source used. Spatially coherent sources provide for small focus spots, but also pronounced surface scatter. There are more options today for metrology light sources than ever before from a wide range of laser diodes, LEDs and super-luminescent diodes available today in many wavelengths, powers and coherence properties. For some applications that use interference effects, high coherence is critical where others that rely on signal peak and phase may be degraded by the coherent effects such as speckle prevalent with most lasers. This paper will explore the use of laser diodes, LEDs and super-luminescent diodes (SLDs) for several metrology applications including interference and structured light methods and present practical results and limitation for with each source.

Conference Presentation

Citation Download Citation

Kevin Harding "Light source options for optical metrology", Proc. SPIE 12672, Applied Optical Metrology V, 126720B (4 October 2023); https://doi.org/10.1117/12.2675054

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