Improved dispersion-coded full-range spectral interferometry for large-depth samples

Tanbin Shao; Kecheng Yang; Min Xia; Wenping Guo

doi:10.1117/12.2688045

27 November 2023 Improved dispersion-coded full-range spectral interferometry for large-depth samples

Tanbin Shao, Kecheng Yang, Min Xia, Wenping Guo

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 127690C (2023) https://doi.org/10.1117/12.2688045
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

We present an improved dispersion-encoded full-range technique that is suitable for samples with a wide range of depths. Considering that the detection optical signal caused by the rough surface of the sample is weak, the signal is easily submerged by the disturbance term and the phase compensation is not accurate. In this paper, the DC is removed by subtracting the envelope of the interference spectrum, so that the DC broadening in the spatial domain is suppressed and the weak signal near the 0 optical path can be resolved. Considering the problem of unwrapping phase error caused by the inherent defects of the system, the accuracy of dispersion phase extraction is improved by evaluating the phase continuity and removing the greatly affected data. Using the proposed measurement method, the depth measurement range of the system is extended from 6mm to 12mm, and the full-depth image of the ceramic standard step block is measured experimentally.

Citation Download Citation

Tanbin Shao, Kecheng Yang, Min Xia, and Wenping Guo "Improved dispersion-coded full-range spectral interferometry for large-depth samples", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 127690C (27 November 2023); https://doi.org/10.1117/12.2688045

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