Laser singulation of high refractive index glasses for augmented reality waveguides

Jason R. Grenier; Erin Hosmer

doi:10.1117/12.3007998

12 March 2024 Laser singulation of high refractive index glasses for augmented reality waveguides

Jason R. Grenier, Erin Hosmer

Proceedings Volume 12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; 1287203 (2024) https://doi.org/10.1117/12.3007998
Event: SPIE LASE, 2024, San Francisco, California, United States

Abstract

As Augmented Reality (AR) and Mixed Reality (MR) devices emerge and promise to revolutionize the way in which we perceive and interact with the world, the continued focus on the low-cost, high-volume manufacturing of the waveguides that underpin the technology is required. A significant challenge is the singulation of the high refractive index glass wafers into individual waveguides without affecting the sensitive optical components (e.g., gratings) on them. The laser nanoPerforation glass singulation process developed by Corning is well-established in multiple industrial applications and has been successfully deployed into high-volume manufacturing for AR waveguide devices. A detailed investigation into optimizing the edge strength of 0.5 mm thick Corning high refractive index glasses (n=1.7-2.0) reveals values in the range of 130-150 MPa (B₁₀). By applying fundamental process understanding and further optimization to Corning 0.3 mm Augmented Reality Systems (ARS) 2.0 glass, an initial demonstration of edge strength values up to 202 MPa (B₁₀) is realized.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Jason R. Grenier and Erin Hosmer "Laser singulation of high refractive index glasses for augmented reality waveguides", Proc. SPIE 12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, 1287203 (12 March 2024); https://doi.org/10.1117/12.3007998

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available