Hybrid Fabry-Perot cavity for multispectral analysis: an experimental demonstration

Sandrine Villenave; Fatima Omeis; Stéphane Monfray; Quentin Abadie; Henri Benisty

doi:10.1117/12.3005181

13 March 2024 Hybrid Fabry-Perot cavity for multispectral analysis: an experimental demonstration

Sandrine Villenave, Fatima Omeis, Stéphane Monfray, Quentin Abadie, Henri Benisty

Proceedings Volume 12897, High Contrast Metastructures XIII; 128970F (2024) https://doi.org/10.1117/12.3005181
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

Multispectral sensors such as Ambient Light sensors (ALS) are becoming increasingly popular due to growing concerns for health, environment, and safety. These sensors provide non-intrusive quantitative and qualitative information on the photonic footprints of interest. To meet the demand for mass production, CMOS image sensors (CIS) are a good basis for these devices. Commercial hyperspectral cameras use a generalization of Bayer-like matrix of Fabry-Perot cavities (FPC) as multispectral filters embedded onto a CIS. However, the delicate fabrication of these filters is tedious and leads to a pronounced surface topology. In this study, we demonstrate experimentally that multispectral sensing can be achieved using a hybrid FPC (h-FPC) which is an improved version of the regular FP cavity, that consists of two silicon mirrors, SiO2 spacer, and a sub-wavelength silicon grating at the center of the cavity. These structures were fabricated using a CMOS compatible process and can be integrated into an imager process flow. The h-FPC optical response can be tuned in the near-infrared region (750-950nm) by changing the filling factor of the grating inside the cavity without varying its height, unlike planar FPC. This feature makes the hybrid FPC a more versatile and efficient option for agile multispectral sensing.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Sandrine Villenave, Fatima Omeis, Stéphane Monfray, Quentin Abadie, and Henri Benisty "Hybrid Fabry-Perot cavity for multispectral analysis: an experimental demonstration", Proc. SPIE 12897, High Contrast Metastructures XIII, 128970F (13 March 2024); https://doi.org/10.1117/12.3005181

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available