High-contrast grating optimization for electrically pumped 1060nm MEMS-VCSELs

E. A. Proano Grijalva; M. Mikulicz; A. Jensen; E. Semenova; T. Ansbæk; K. Yvind

doi:10.1117/12.3002355

13 March 2024 High-contrast grating optimization for electrically pumped 1060nm MEMS-VCSELs

E. A. Proano Grijalva, M. Mikulicz, A. Jensen, E. Semenova, T. Ansbæk, K. Yvind

Proceedings Volume 12904, Vertical-Cavity Surface-Emitting Lasers XXVIII; 129040I (2024) https://doi.org/10.1117/12.3002355
Event: SPIE OPTO, 2024, San Francisco, California, United States

Abstract

In our paper, the design of a high contrast grating is optimized to obtain a wider reflectivity bandwidth. HCGs present an incidence angle dependence that can affect the reflectivity bandwidth. This dependence was mitigated by reducing the duty cycle of the HCG. A further optimized model was done by matching the reflectivity phase with the phase of the incident Gaussian wavefront. The broader bandwidth of the new designs was calculated using simulations. Subsequently the MEMS VCSELs with the new designs of HCG were fabricated. The highest tuning range obtained for the focusing design was 45nm and for the low duty cycle design 38nm. These ranges are lower than the standard design due to differences from the design. Further improvements in the fabrication process are required to demonstrate the new designs proposed.

Conference Presentation

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

E. A. Proano Grijalva, M. Mikulicz, A. Jensen, E. Semenova, T. Ansbæk, and K. Yvind "High-contrast grating optimization for electrically pumped 1060nm MEMS-VCSELs", Proc. SPIE 12904, Vertical-Cavity Surface-Emitting Lasers XXVIII, 129040I (13 March 2024); https://doi.org/10.1117/12.3002355

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