Smooth surface 3D morphology measurement technology based on adaptive light source

Yan Xie; Qian Zhou; Xiaohao Wang

doi:10.1117/12.3007695

18 December 2023 Smooth surface 3D morphology measurement technology based on adaptive light source

Yan Xie, Qian Zhou, Xiaohao Wang

Proceedings Volume 12964, AOPC 2023: Optical Design and Manufacturing ; 129640H (2023) https://doi.org/10.1117/12.3007695
Event: Applied Optics and Photonics China 2023 (AOPC2023), 2023, Beijing, China

Abstract

The use of surface light sources enables accurate measurement of the morphology of high reflection surfaces. The fringe deflection method is a cost-effective and non-contact technology used to detect defects and measure the morphology of high-reflectivity surfaces. While this method can theoretically achieve global measurement of complex smooth surfaces, it faces practical challenges due to the significant difference in reflectivity across the surface. The high reflectivity area is easily affected by overexposure. Even if the exposure time and aperture can be adjusted, it can lead to significant quantization errors in the low reflectivity area, resulting in regional differences in measurement range errors. To address this issue and achieve simultaneous detection of multi-reflectivity objects without compromising accuracy, this paper proposes a novel detection method that adaptively adjusts the light source. By adjusting the exposure to obtain unsaturated captured images, absolute phase roughness measurement is achieved. Using the relationship between phase and projection fringes, spatial correspondence between the pixel coordinate system and the light source coordinate system is established, and adaptive adjustments are made to the projection light source. This approach enables adaptive intensity adjustments based on the reflectivity of the measured surface, facilitating high-precision measurement of complex surfaces. Overall, this adaptive light source technology enhances the fringe deflection method's accuracy and versatility, making it suitable for measuring complex surfaces with high reflectivity variations.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Yan Xie, Qian Zhou, and Xiaohao Wang "Smooth surface 3D morphology measurement technology based on adaptive light source", Proc. SPIE 12964, AOPC 2023: Optical Design and Manufacturing , 129640H (18 December 2023); https://doi.org/10.1117/12.3007695

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KEYWORDS

Phase shifts

Cameras

Reflection

Mirror surfaces

3D metrology

Imaging systems

Phase measurement

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