A diffusion-based phase shifting network for fringe analysis

Ke Zhang; Bai Chenyao; Zhu Yunlong

doi:10.1117/12.3007696

29 December 2023 A diffusion-based phase shifting network for fringe analysis

Ke Zhang, Bai Chenyao, Zhu Yunlong

Proceedings Volume 12976, Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2023); 129760J (2023) https://doi.org/10.1117/12.3007696
Event: 8th Asia Pacific Conference on Optics Manufacture & 3rd International Forum of Young Scientists on Advanced Optical Manufacturing, 2023, Shenzhen, China

Abstract

This paper proposes a frige phase-shifting technique based on the diffusion model. Phase-shifting interferometry is a commonly used method in white-light interferometric measurements, where phase shift values used as known quantities for analyzing the fringes. However, when the measurement environment introduces significant disturbances, the quality of recorded fringe patterns at different time intervals for phase shifting decreases, making it difficult to perform real-time measurements and in-line inspections in highly interfered processing environments. Additionally, the phase shift error introduced by the lead zirconate titanate (Pb[Zr_x Ti_1−x]O₃ or PZT) phase shifter easily deviates the phase shift values from their ideal values. The implemented virtual phase shifter in this study utilizes a diffusion model, which allows for the input of a raw, noise-contaminated fringe pattern and produces a noise-free fringe pattern after phase shifting. Experimental results demonstrate that our method can generate clear fringe patterns and accurately restore phase information even when the signal-to-noise ratio is 0.5 dB. The residual Peak-to-Valley (PV) and Root Mean Square Error (RMSE) values compared to the true phase are 0.8867 rad and 0.0779 rad, respectively.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Ke Zhang, Bai Chenyao, and Zhu Yunlong "A diffusion-based phase shifting network for fringe analysis", Proc. SPIE 12976, Eighth Asia Pacific Conference on Optics Manufacture and Third International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2023), 129760J (29 December 2023); https://doi.org/10.1117/12.3007696

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KEYWORDS

Fringe analysis

Signal to noise ratio

Phase shifts

Diffusion

Deep learning

Phase shifting

Zernike polynomials

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