Femtosecond Bessel beam-assisted wet etching for the fabrication of microhole arrays on YAG crystal

Lin Chen; Tong Zhang; Heng Yang; Mingyuan Wang; Zhiyong Wang

doi:10.1117/12.3023703

18 March 2024 Femtosecond Bessel beam-assisted wet etching for the fabrication of microhole arrays on YAG crystal

Lin Chen, Tong Zhang, Heng Yang, Mingyuan Wang, Zhiyong Wang

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131045W (2024) https://doi.org/10.1117/12.3023703
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

Optical waveguides play an important role in the fields of optical communications and optical sensing. As optical waveguide substrate materials, yttrium aluminum garnet (YAG) crystals have a high refractive index, high thermal conductivity, high optical quality, and good chemical stability. However, YAG crystals are difficult to fabricate since they are chemically inactive and have a Mohs hardness of 8.5. This article has proposed a method of rapidly preparing microhole arrays on YAG crystals using a femtosecond laser single-pulse Bessel beam combined with wet etching technology. The experiment used a titanium sapphire re-amplified femtosecond laser with a central wavelength of 800nm and a pulse width of 50fs. The femtosecond laser was modulated into femtosecond Bessel light using the axicon, and the beam was focused into the interior of the YAG crystal sample through a focusing objective. The sample was placed on a precision three-dimensional displacement platform, and the arrangement of microhole array distribution could be achieved by changing parameters such as repetition frequency, scanning speed, and scanning direction. Subsequently, phosphoric acid solution was used to corrode the samples to optimize the pore size and morphology features. By systematically studying and summarizing the effects of parameters such as power, focusing position on the morphology, depth, and aspect ratio of microholes. The optimal parameter range was integrated to regulate the microhole array structure. Large-area uniform microhole array with an aspect ratio of approximately 300:1 and good taper was finally obtained.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Lin Chen, Tong Zhang, Heng Yang, Mingyuan Wang, and Zhiyong Wang "Femtosecond Bessel beam-assisted wet etching for the fabrication of microhole arrays on YAG crystal", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131045W (18 March 2024); https://doi.org/10.1117/12.3023703

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KEYWORDS

Femtosecond phenomena

YAG lasers

Crystals

Bessel beams

Wet etching

Laser crystals

Fabrication

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