Film growth mode and related film properties in pulsed laser-plasma deposition

Simeon Metev; Krassimira Meteva

doi:10.1117/12.23722

1 October 1990 Film growth mode and related film properties in pulsed laser-plasma deposition

Simeon Metev, Krassimira Meteva

Proceedings Volume 1352, 1st Intl School on Laser Surface Microprocessing; (1990) https://doi.org/10.1117/12.23722
Event: International School on Laser Surface Microprocessing, 1989, Tashkent, Uzbekistan

Abstract

In the paper the results of a theoretical investigation of the growth process of laserplasma deposited thin films are discussed. A kinetic approach has been used to establish direct relation between experimental conditions (laser flux density substrate temperature) and film properties (thickness structure) . The results of some ex perimental investigations of the deposition process are presented confirming the general conclusions of the developed theoretical mo del. 1 .

Citation Download Citation

Simeon Metev and Krassimira Meteva "Film growth mode and related film properties in pulsed laser-plasma deposition", Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); https://doi.org/10.1117/12.23722

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available