The Use Of Microdensitometers As A Basis For Highly Accurate Metrology

H. J. Caulfield; David L. Kryger

doi:10.1117/12.938211

15 December 1978 The Use Of Microdensitometers As A Basis For Highly Accurate Metrology

H. J. Caulfield, David L. Kryger

Proceedings Volume 0153, Advances in Optical Metrology I; (1978) https://doi.org/10.1117/12.938211
Event: 22nd Annual Technical Symposium, 1978, San Diego, United States

Abstract

Microdensitometers have already solved the problem of maintaining high spped and high accuracy across large regions of space. Modifications are needed to operate with much higher speed and in the reflection mode. Experimental results confirm accuracies better than 0.1 gm over areas over 40 cm.

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H. J. Caulfield and David L. Kryger "The Use Of Microdensitometers As A Basis For Highly Accurate Metrology", Proc. SPIE 0153, Advances in Optical Metrology I, (15 December 1978); https://doi.org/10.1117/12.938211

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