Diagnostics of a DC plasma torch

Derrick A. Russell; Peter Taborek

doi:10.1117/12.48276

1 December 1991 Diagnostics of a DC plasma torch

Derrick A. Russell, Peter Taborek

Proceedings Volume 1534, Diamond Optics IV; (1991) https://doi.org/10.1117/12.48276
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Optical emission spectroscopy, Langmuir probes, and calorimetric techniques have been used to characterize the plasma jet in a DC plasma torch diamond deposition apparatus. The experimental data are compared to calculations based on a thermodynamic equilibrium model. The ion temperature obtained from the atomic hydrogen emission is within 10% of the calorimetrically deduced gas temperature, while the electron temperature is approximately a factor of two higher. For a wide range of process conditions, the plasma temperature is almost independent of the torch input power, but depends strongly on the hydrogen concentration in the feed gas. Calorimetry provides a means of measuring the concentration of atomic hydrogen produced by the torch.

Citation Download Citation

Derrick A. Russell and Peter Taborek "Diagnostics of a DC plasma torch", Proc. SPIE 1534, Diamond Optics IV, (1 December 1991); https://doi.org/10.1117/12.48276

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