Real-time quantitative imaging for semiconductor crystal growth, control, and characterization

Michael J. Wargo

doi:10.1117/12.49606

1 December 1991 Real-time quantitative imaging for semiconductor crystal growth, control, and characterization

Michael J. Wargo

Proceedings Volume 1557, Crystal Growth in Space and Related Optical Diagnostics; (1991) https://doi.org/10.1117/12.49606
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

A quantitative real-time image processing system has been developed which, by software control, can be reconfigured for a multiplicity of tasks critical to the processing and characterization of semiconductor materials. In thermal imager mode, two-dimensional temperature distributions of semiconductor melt surfaces (900 degree(s)C - 1600 degree(s)C) can be obtained with temperature resolution better than +/- 0.5 degree(s)C and spatial resolution of better than 0.5 mm. This capability has been applied to the analysis of melt surface thermal field distributions. Temporal and spatial image processing techniques, combined with multitasking computational and data acquisition capabilities have been used to establish this approach to thermal imaging as a multimode sensor for systems control during crystal growth. A second configuration of the image processing engine in conjunction with bright and dark field transmission optics is used to determine, post growth, the microdistribution of free-charge carriers and submicron-sized crystalline defects in elemental and compound semiconductors. These techniques are nonintrusive. The infrared absorption characteristics of wafers are determined with a spatial resolution of less than 10 micrometers and, after calibration, are converted into charge carrier density. These experimental configurations for sensing, control, and characterization are readily adaptable for remote telescience operation.

Citation Download Citation

Michael J. Wargo "Real-time quantitative imaging for semiconductor crystal growth, control, and characterization", Proc. SPIE 1557, Crystal Growth in Space and Related Optical Diagnostics, (1 December 1991); https://doi.org/10.1117/12.49606

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available