Paper
1 May 1994 Intelligent process monitoring of multilayer ceramic actuators using high-temperature optical fiber displacement sensors
Michael F. Gunther, Richard O. Claus, Andrew P. Ritter, Tuan A. Tran, Jonathan A. Greene
Author Affiliations +
Abstract
A technique that uses embedded or attached high temperature optical fiber sensors is demonstrated for the intelligent processing of multilayer ceramic actuator elements. Presented are the results of the fiber optic strain sensor used to monitor internal displacements associated with the burnout of organic binders from a green actuator sample. Also presented is the method of operation of the low-finesse Fabry-Perot interferometric sensor, and post processing results obtained using the same type of sensor for tracking actuator performance and hysterisis.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michael F. Gunther, Richard O. Claus, Andrew P. Ritter, Tuan A. Tran, and Jonathan A. Greene "Intelligent process monitoring of multilayer ceramic actuators using high-temperature optical fiber displacement sensors", Proc. SPIE 2191, Smart Structures and Materials 1994: Smart Sensing, Processing, and Instrumentation, (1 May 1994); https://doi.org/10.1117/12.173953
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
Sensors

Actuators

Fiber optics sensors

Ceramics

Fabry–Perot interferometers

Intelligent sensors

Optical fibers

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