Super-smooth polishing on aspherical surfaces (II): achievement of a super-smooth polishing

Manabu Ando; Mahito Negishi; Masafumi Takimoto; Akinobu Deguchi; Nobuo Nakamura

doi:10.1117/12.215613

2 August 1995 Super-smooth polishing on aspherical surfaces (II): achievement of a super-smooth polishing

Manabu Ando, Mahito Negishi, Masafumi Takimoto, Akinobu Deguchi, Nobuo Nakamura

Proceedings Volume 2576, International Conference on Optical Fabrication and Testing; (1995) https://doi.org/10.1117/12.215613
Event: International Conferences on Optical Fabrication and Testing and Applications of Optical Holography, 1995, Tokyo, Japan

Abstract

This paper discusses super-smooth polishing technology for excimer lasers, soft X-rays, and other short-wavelength light applications. Short-wavelength light elements require surface quality and contour accuracy superior to traditional specifications, as well as free-form contours. For this reason, our target for free-form contours of a 500 mm diameter was set to 0.08 mm PV for contour accuracy, and 0.2 nm RMS for surface roughness. To improve surface quality we employed local pitch polishing, utilizing a flexible tool laminated with an elastic sheet, which adapts well to various contours. For greater contour accuracy, we developed the CSSP (Canon Super-Smooth Polisher), which polishes 500 mm diameter optical elements. The CSSP polishing process achieves a contour accuracy of 0.078 mm PV and a surface roughness of 0.13 nm RMS on a 500 mm diameter fused silica toroidal mirror. We also fabricated both CaF2 and CVD-SiC, materials widely used in short-wavelength light elements.

Citation Download Citation

Manabu Ando, Mahito Negishi, Masafumi Takimoto, Akinobu Deguchi, and Nobuo Nakamura "Super-smooth polishing on aspherical surfaces (II): achievement of a super-smooth polishing", Proc. SPIE 2576, International Conference on Optical Fabrication and Testing, (2 August 1995); https://doi.org/10.1117/12.215613

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