Characterization of surface roughness by heterodyne interferometry theory and experiment

Patrick Chaton; Francoise Baume; Laurent Jouanet; Jean-Yves Robic

doi:10.1117/12.246759

19 August 1996 Characterization of surface roughness by heterodyne interferometry: theory and experiment

Patrick Chaton, Francoise Baume, Laurent Jouanet, Jean-Yves Robic

Proceedings Volume 2775, Specification, Production, and Testing of Optical Components and Systems; (1996) https://doi.org/10.1117/12.246759
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Heterodyne interferometry is a powerful technique for measuring very small phase variations of modulated signals which has been widely used for measuring the roughness of optical surfaces. This paper will begin with a general recall of the principles of this technique. We then propose a method based on the use of the statistical moments of the height distribution of roughness. In order to quantify the stationary of the surface roughness, methodology based on the study surface roughness of BK7, heavy glass and silicon dioxide.

Citation Download Citation

Patrick Chaton, Francoise Baume, Laurent Jouanet, and Jean-Yves Robic "Characterization of surface roughness by heterodyne interferometry: theory and experiment", Proc. SPIE 2775, Specification, Production, and Testing of Optical Components and Systems, (19 August 1996); https://doi.org/10.1117/12.246759

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