Interferometric method for characterizing the mechanical properties of thin films by bulging tests

Eric Bonnotte; L. Robert; Patrick Delobelle; Luc Bornier; Bertrand Trolard; Gilbert M. Tribillon; D. Mairey

doi:10.1117/12.250800

18 September 1996 Interferometric method for characterizing the mechanical properties of thin films by bulging tests

Eric Bonnotte, L. Robert, Patrick Delobelle, Luc Bornier, Bertrand Trolard, Gilbert M. Tribillon, D. Mairey

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250800
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

A fringe projection method (contouring) is applied for the mechanical characterization of thin films by bulging tests. This method is then coupled with the technique of phase modulation (phase shifting interferometry) thus allowing the phase image of the membrane, hence the displacements at all points, to be determined. We discuss the precision and the sensitivity of the method. This technique is then applied to membrane bulging tests performed on single silicon crystals, on thin Si-SiO₂ films and on electro-deposited nickel. For these materials, the Young's moduli and the internal stresses resulting from the fabrication process are determined and compared with the values obtained by other methods. The examples presented allow the principle of the bulging test and the apparatus to be validated.

Citation Download Citation

Eric Bonnotte, L. Robert, Patrick Delobelle, Luc Bornier, Bertrand Trolard, Gilbert M. Tribillon, and D. Mairey "Interferometric method for characterizing the mechanical properties of thin films by bulging tests", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250800

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